Abstract
Deep levels in AlInP layers, grown by metal-organic chemical vapor deposition (MOCVD) with various V/III mole ratios, have been carefully investigated by deep-level transient spectroscopy (DLTS). A deep level originating from phosphorus vacancy was observed with the activation energy of 0.65 eV. Examining this phosphorus-vacancy-related deep level provided a relatively simple means of understanding the phosphorus vacancy in AlInP, thus allowing us to determine an appropriate V/III mole ratio for growing AlInP.
Original language | English |
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Pages (from-to) | L567-L568 |
Journal | Japanese Journal of Applied Physics, Part 2: Letters |
Volume | 39 |
Issue number | 6 B |
DOIs | |
State | Published - 15 Jun 2000 |