TY - JOUR
T1 - Performance of p-side-up thin-film AlGaInP light-emitting diodes with textured composite aluminum-doped zinc oxide transparent conductive layers
AU - Tseng, Ming Chun
AU - Wuu, Dong Sing
AU - Chen, Chi Lu
AU - Lee, Hsin Ying
AU - Lin, Yu Chang
AU - Horng, Ray-Hua
PY - 2017/6/25
Y1 - 2017/6/25
N2 - Composite transparent conductive layers (TCLs) were deposited on the GaP window layer of p-side-up thin-film AlGaInP light-emitting diodes (LEDs) in order to enhance their light-extraction efficiency. The composite TCLs were fabricated from aluminum-doped zinc oxide (AZO) layers grown through atomic-layer deposition and pulsed-laser deposition. The results showed that wet-etching of composite AZO thin films improved the light-extraction efficiency of the corresponding LED devices. The droop efficiencies of LEDs with flat AZO thin films, composite AZO thin films, and optimum textured composite AZO thin films were 29%, 30%, and 22%, respectively. LEDs with textured composite AZO layers exhibited favorable optoelectronic performance. When the injection current was increased from 20 to 1000 mA, the emission wavelengths of LEDs with flat AZO thin films, composite AZO thin films, and optimum textured composite AZO thin films shifted by 3, 5, and 3 nm, respectively. The optimum textured composite AZO thin film can not only improve LED performance but also effectively substitute flat TCLs in AlGaInP LED applications.
AB - Composite transparent conductive layers (TCLs) were deposited on the GaP window layer of p-side-up thin-film AlGaInP light-emitting diodes (LEDs) in order to enhance their light-extraction efficiency. The composite TCLs were fabricated from aluminum-doped zinc oxide (AZO) layers grown through atomic-layer deposition and pulsed-laser deposition. The results showed that wet-etching of composite AZO thin films improved the light-extraction efficiency of the corresponding LED devices. The droop efficiencies of LEDs with flat AZO thin films, composite AZO thin films, and optimum textured composite AZO thin films were 29%, 30%, and 22%, respectively. LEDs with textured composite AZO layers exhibited favorable optoelectronic performance. When the injection current was increased from 20 to 1000 mA, the emission wavelengths of LEDs with flat AZO thin films, composite AZO thin films, and optimum textured composite AZO thin films shifted by 3, 5, and 3 nm, respectively. The optimum textured composite AZO thin film can not only improve LED performance but also effectively substitute flat TCLs in AlGaInP LED applications.
KW - Composite aluminum-doped zinc oxide
KW - Light-emitting diodes
KW - Texture surface
UR - http://www.scopus.com/inward/record.url?scp=85008199802&partnerID=8YFLogxK
U2 - 10.1016/j.surfcoat.2016.12.002
DO - 10.1016/j.surfcoat.2016.12.002
M3 - Article
AN - SCOPUS:85008199802
SN - 0257-8972
VL - 320
SP - 421
EP - 425
JO - Surface and Coatings Technology
JF - Surface and Coatings Technology
ER -