Performance improvement of Ge fin field-effect transistors by post-fin-fabrication annealing

Wataru Mizubayashi*, Hiroshi Oka, Takahiro Mori, Yuki Ishikawa, Seiji Samukawa, Kazuhiko Endo

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

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Keyphrases

Engineering

Material Science