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Performance improvement of blue light micro-light emitting diodes (< 20 μm) by neutral beam etching process
Yu Hsuan Hsu, Yun Cheng Hsu, Chien Chung Lin, Yi Hsin Lin, Dong Sing Wuu, Hao Chung Kuo, Seiji Samukawa, Ray Hua Horng*
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
1
Scopus
citations