Performance comparison of InGaN-based 40–80 μm micro-LEDs fabricated with and without plasma etching

Yu Yun Lo, Yi Ho Chen, Yun Cheng Hsu, Tzu Yi Lee, Yu Ying Hung, Yu Cheng Kao, Hsiao Wen Zan, Dong Sing Wuu, Hao Chung Kuo, Seiji Samukawa, Ray Hua Horng*

*Corresponding author for this work

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Engineering

Material Science