Skip to main navigation Skip to search Skip to main content

Performance and interface characterization for contact etch stop layer-strained nMOSFET with HfO2 gate dielectrics under pulsed-IV measurement

  • Woei Cherng Wu*
  • , Tien-Sheng Chao
  • , Te Hsin Chiu
  • , Jer Chyi Wang
  • , Chao Sung Lai
  • , Ming Wen Ma
  • , Wen Cheng Lo
  • *Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

3 Scopus citations

Fingerprint

Dive into the research topics of 'Performance and interface characterization for contact etch stop layer-strained nMOSFET with HfO2 gate dielectrics under pulsed-IV measurement'. Together they form a unique fingerprint.
Sort by

Keyphrases

Material Science