Abstract
The study presents the use of Taguchi method to obtain the best ESD performance devices and compares the performance with other methods. A full-factor method to obtain the best ESD performance devices can achieve all experimental factor effects, but at a significant cost. Through silicon data validation and analysis, Taguchi's method has been shown to save two-thirds of the cost for optimal ESD devices compared to the full-factor approach. In addition, if the layout area is very concerned in advanced technologies such as 40 nm and 28 nm, a tentative method called the single-factor-middle-level method is proposed as another ESD device optimization method.
Original language | English |
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Article number | 114662 |
Journal | Microelectronics Reliability |
Volume | 136 |
DOIs | |
State | Published - Sep 2022 |
Keywords
- ESD
- HBM
- MM
- Taguchi