Optimized ONO thickness for multi-level and 2-bit/cell operation for wrapped-select-gate (WSG) SONOS memory

Woei Cherng Wu*, Tien-Sheng Chao, Wu Chin Peng, Wen Luh Yang, Jian Hao Chen, Ming Wen Ma, Chao Sung Lai, Tsung Yu Yang, Chien Hsing Lee, Tsung Min Hsieh, Jhyy Cheng Liou, Tzu Ping Chen, Chien Hung Chen, Chih Hung Lin, Hwi Huang Chen, Joe Ko

*Corresponding author for this work

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Chemical Engineering

Engineering