Abstract
In this work, a novel nanogap with inclined protrusion cathode in palladium strip fabricated by hydrogen absorption under high-pressure treatment is optimized for the surface conduction electron-emitter. Its field emission is sensitive to the geometry of surface conduction electron-emitters (SCE). For a specified emitter material, the SCE are further investigated by varying the thickness, tilted angle and gap of palladium (Pd). An optimal field emission efficiency with 80° tilted angle, 120 nm gap and 10 nm thickness of Pd is found for certain designed field emission efficiency. We further find that varying the emitter material work function of the emitter material from 5.12 eV to 3.9 eV will further improve the field emission property due to the increase of the emitted current.
Original language | English |
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Pages (from-to) | 699-703 |
Number of pages | 5 |
Journal | Microelectronics Reliability |
Volume | 50 |
Issue number | 5 |
DOIs | |
State | Published - May 2010 |