Optical beam induced current microscopy at DC and radio frequency

Fu Jen Kao*

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

1 Scopus citations

Abstract

In this paper we introduce the concept and technique of optical beam induced current (OBIC) generation at radio frequencies. The method is combined with lateral raster scanning of a tightly focused spot so as to generate a mapping of high spatial resolution. We demonstrate experimentally that if a mode-locked laser is used to excite the sample then the frequency transfer function of the optically active device is readily obtained with at least 1 μm spatial resolution, in real time. In addition, with the help of an appropriate electronic arrangement, we demonstrate how to obtain pseudo-colored OBIC images of the sample.

Original languageEnglish
Pages (from-to)143-150
Number of pages8
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume5353
DOIs
StatePublished - 2004
EventSemiconductor Photodetectors - San Jose, CA, United States
Duration: 28 Jan 200429 Jan 2004

Keywords

  • Mode-locked laser
  • Optical Beam Induced Current (OBIC)
  • Radio Frequency (RF)

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