Optical beam induced current microscopy at DC and radio frequency

Fu Jen Kao*

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

1 Scopus citations


In this paper we introduce the concept and technique of optical beam induced current (OBIC) generation at radio frequencies. The method is combined with lateral raster scanning of a tightly focused spot so as to generate a mapping of high spatial resolution. We demonstrate experimentally that if a mode-locked laser is used to excite the sample then the frequency transfer function of the optically active device is readily obtained with at least 1 μm spatial resolution, in real time. In addition, with the help of an appropriate electronic arrangement, we demonstrate how to obtain pseudo-colored OBIC images of the sample.

Original languageEnglish
Pages (from-to)143-150
Number of pages8
JournalProceedings of SPIE - The International Society for Optical Engineering
StatePublished - 2004
EventSemiconductor Photodetectors - San Jose, CA, United States
Duration: 28 Jan 200429 Jan 2004


  • Mode-locked laser
  • Optical Beam Induced Current (OBIC)
  • Radio Frequency (RF)


Dive into the research topics of 'Optical beam induced current microscopy at DC and radio frequency'. Together they form a unique fingerprint.

Cite this