Abstract
A novel on-chip ESD protection design by using polysilicon diodes for smart card application is reported in this paper. By adding an efficient VDD-to-VSS clamp circuit, the HBM ESD level of the smart card IC with polysilicon diodes as the ESD protection devices have been successfully improved from the original approximately 300 V to become ≥3 kV. Different process splits have been experimentally evaluated to find the suitable doping concentration for optimizing, the polysilicon diodes for both smart card application and on-chip ESD protection design.
Original language | English |
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Article number | 890086 |
Pages (from-to) | 266-275 |
Number of pages | 10 |
Journal | Electrical Overstress/Electrostatic Discharge Symposium Proceedings |
DOIs | |
State | Published - 26 Sep 2000 |
Event | Electrical Overstress/Electrostatic Discharge Symposium Proceedings - Anaheim, CA, USA Duration: 26 Sep 2000 → 28 Sep 2000 |