Abstract
Capacitance-frequency measurement is used to study In0.12Ga0.88As/GaAs p-i-n superlattice, with superlattice layer grown at 300 °C by molecular-beam epitaxy. Three traps are observed, and their parameters are consistent with those obtained from deep-level transient spectroscopy. Among these three traps, the trap (Ea=0.45±0.02eV, σ=6±4 × 10-17 cm2) shows an abnormal increase of capacitance with increasing frequency, similar to that observed from the 0.66 eV trap in low-temperature grown GaAs p-i-n structure, suggesting that it is created by the low-temperature growth and is a generation-recombination center. This result also shows that the capacitance-frequency measurement is effective in studying the generation-recombination centers.
Original language | English |
---|---|
Pages (from-to) | 1092-1094 |
Number of pages | 3 |
Journal | Applied Physics Letters |
Volume | 75 |
Issue number | 8 |
DOIs | |
State | Published - 23 Aug 1999 |