Novel precleaning treatment for selective tungsten chemical vapor deposition

T. C. Chang^*, Y. S. Mor, Po-Tsun Liu, S. M. Sze, Y. L. Yang, M. S. Tsai, C. Y. Chang

^*Corresponding author for this work

Department of Photonics

Research output: Contribution to journal › Conference article › peer-review

1 Scopus citations

Keyphrases

Material Science

Engineering

Pharmacology, Toxicology and Pharmaceutical Science

Chemical Engineering