Novel Graphene Transfer Method to Silicone and its Sensing Application on Porous PDMS

Padmanabh Pundrikaksha Pancham; Anupam Mukherjee; Boong Lek Yuan; Peichen Yu; Wen Hsin Chiu; Gufran Ahmad; Sandipan Mallik; Cheng Yao Lo

doi:10.1109/LSENS.2023.3265702

Novel Graphene Transfer Method to Silicone and its Sensing Application on Porous PDMS

Padmanabh Pundrikaksha Pancham
, Anupam Mukherjee
, Boong Lek Yuan
, Peichen Yu
, Wen Hsin Chiu
, Gufran Ahmad
, Sandipan Mallik
, Cheng Yao Lo^*

^*Corresponding author for this work

Department of Photonics

Research output: Contribution to journal › Article › peer-review

4 Scopus citations

Abstract

In this letter, we demonstrate a simple and sensitive parallel-plate capacitive pressure sensor fabricated on biocompatible, weather durable, elastic composite silicone, and polyurethane substrate with porous polydimethylsiloxane (PDMS) dielectric made through a mixture of water as spacers. This sensor comprised a graphene electrode, which was developed through novel chemical vapor deposition on copper with hot press transfer process. The sensitivity of the sensor exhibits a positive correlation with the dielectric porosity. In addition, this device exhibits fast response time and wide dynamic window for applications. The highest sensitivity of 3.01 kPa-1 at 20% water concentration in PDMS for the dynamic range of 0-40 kPa was achieved with a response time of 0.25 s and detection resolution of 0.4 pF.

Original language	English
Article number	2000504
Journal	IEEE Sensors Letters
Volume	7
Issue number	5
DOIs	https://doi.org/10.1109/LSENS.2023.3265702
State	Published - 1 May 2023

Keywords

Sensor materials
capacitive pressure sensor
chemical vapor deposition
graphene
polydimethylsiloxane (PDMS)

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10.1109/LSENS.2023.3265702

Cite this

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title = "Novel Graphene Transfer Method to Silicone and its Sensing Application on Porous PDMS",

abstract = "In this letter, we demonstrate a simple and sensitive parallel-plate capacitive pressure sensor fabricated on biocompatible, weather durable, elastic composite silicone, and polyurethane substrate with porous polydimethylsiloxane (PDMS) dielectric made through a mixture of water as spacers. This sensor comprised a graphene electrode, which was developed through novel chemical vapor deposition on copper with hot press transfer process. The sensitivity of the sensor exhibits a positive correlation with the dielectric porosity. In addition, this device exhibits fast response time and wide dynamic window for applications. The highest sensitivity of 3.01 kPa-1 at 20\% water concentration in PDMS for the dynamic range of 0-40 kPa was achieved with a response time of 0.25 s and detection resolution of 0.4 pF.",

keywords = "Sensor materials, capacitive pressure sensor, chemical vapor deposition, graphene, polydimethylsiloxane (PDMS)",

author = "Pancham, \{Padmanabh Pundrikaksha\} and Anupam Mukherjee and Yuan, \{Boong Lek\} and Peichen Yu and Chiu, \{Wen Hsin\} and Gufran Ahmad and Sandipan Mallik and Lo, \{Cheng Yao\}",

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doi = "10.1109/LSENS.2023.3265702",

language = "English",

volume = "7",

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T1 - Novel Graphene Transfer Method to Silicone and its Sensing Application on Porous PDMS

AU - Pancham, Padmanabh Pundrikaksha

AU - Mukherjee, Anupam

AU - Yuan, Boong Lek

AU - Yu, Peichen

AU - Chiu, Wen Hsin

AU - Ahmad, Gufran

AU - Mallik, Sandipan

AU - Lo, Cheng Yao

PY - 2023/5/1

Y1 - 2023/5/1

N2 - In this letter, we demonstrate a simple and sensitive parallel-plate capacitive pressure sensor fabricated on biocompatible, weather durable, elastic composite silicone, and polyurethane substrate with porous polydimethylsiloxane (PDMS) dielectric made through a mixture of water as spacers. This sensor comprised a graphene electrode, which was developed through novel chemical vapor deposition on copper with hot press transfer process. The sensitivity of the sensor exhibits a positive correlation with the dielectric porosity. In addition, this device exhibits fast response time and wide dynamic window for applications. The highest sensitivity of 3.01 kPa-1 at 20% water concentration in PDMS for the dynamic range of 0-40 kPa was achieved with a response time of 0.25 s and detection resolution of 0.4 pF.

AB - In this letter, we demonstrate a simple and sensitive parallel-plate capacitive pressure sensor fabricated on biocompatible, weather durable, elastic composite silicone, and polyurethane substrate with porous polydimethylsiloxane (PDMS) dielectric made through a mixture of water as spacers. This sensor comprised a graphene electrode, which was developed through novel chemical vapor deposition on copper with hot press transfer process. The sensitivity of the sensor exhibits a positive correlation with the dielectric porosity. In addition, this device exhibits fast response time and wide dynamic window for applications. The highest sensitivity of 3.01 kPa-1 at 20% water concentration in PDMS for the dynamic range of 0-40 kPa was achieved with a response time of 0.25 s and detection resolution of 0.4 pF.

KW - Sensor materials

KW - capacitive pressure sensor

KW - chemical vapor deposition

KW - graphene

KW - polydimethylsiloxane (PDMS)

UR - https://www.scopus.com/pages/publications/85153504460

U2 - 10.1109/LSENS.2023.3265702

DO - 10.1109/LSENS.2023.3265702

M3 - Article

AN - SCOPUS:85153504460

SN - 2475-1472

VL - 7

JO - IEEE Sensors Letters

JF - IEEE Sensors Letters

IS - 5

M1 - 2000504

ER -

Novel Graphene Transfer Method to Silicone and its Sensing Application on Porous PDMS

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Keywords

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