Novel Graphene Transfer Method to Silicone and its Sensing Application on Porous PDMS

Padmanabh Pundrikaksha Pancham, Anupam Mukherjee, Boong Lek Yuan, Peichen Yu, Wen Hsin Chiu, Gufran Ahmad, Sandipan Mallik, Cheng Yao Lo*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

2 Scopus citations

Abstract

In this letter, we demonstrate a simple and sensitive parallel-plate capacitive pressure sensor fabricated on biocompatible, weather durable, elastic composite silicone, and polyurethane substrate with porous polydimethylsiloxane (PDMS) dielectric made through a mixture of water as spacers. This sensor comprised a graphene electrode, which was developed through novel chemical vapor deposition on copper with hot press transfer process. The sensitivity of the sensor exhibits a positive correlation with the dielectric porosity. In addition, this device exhibits fast response time and wide dynamic window for applications. The highest sensitivity of 3.01 kPa-1 at 20% water concentration in PDMS for the dynamic range of 0-40 kPa was achieved with a response time of 0.25 s and detection resolution of 0.4 pF.

Original languageEnglish
Article number2000504
JournalIEEE Sensors Letters
Volume7
Issue number5
DOIs
StatePublished - 1 May 2023

Keywords

  • capacitive pressure sensor
  • chemical vapor deposition
  • graphene
  • polydimethylsiloxane (PDMS)
  • Sensor materials

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