@inproceedings{2eab645f7d314446a5d8b0b6d2b423dc,
title = "Novel electrothermal bimorph actuator for large out-of-plane displacement and force",
abstract = "This paper presents a novel concept and experimental validation of an electrothermal bimorph structure for out-of-plane actuation that exploits the polymer constraint effect. The proposed concept is capable of generating large out-of-plane displacements and forces at a low driving voltage and a low actuation temperature. A downward displacement up to 31 ?m is measured at only 5 V driving voltage and 46 mW power consumption. The actuator stiffness is measured to be 75 N/m, thus the corresponding calculated out-of-plane force is 2.3 mN. The maximum actuation temperature during the measurement is 100°C (80°C change). A 25 Hz response frequency is measured by monitoring the resistance change due to the temperature variation.",
author = "J. Wei and {Chu Duc}, T. and Lau, {Gih Keong} and Sarro, {P. M.}",
year = "2008",
month = aug,
day = "29",
doi = "10.1109/MEMSYS.2008.4443589",
language = "English",
isbn = "9781424417933",
series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",
pages = "46--49",
booktitle = "MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems",
note = "21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson ; Conference date: 13-01-2008 Through 17-01-2008",
}