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Novel Cu-to-Cu bonding with Ti passivation at 180^{\circ}{\rm C} in 3-D integration

  • Yan Pin Huang
  • , Yu San Chien
  • , Ruoh Ning Tzeng
  • , Ming Shaw Shy
  • , Teu Hua Lin
  • , Kou Hua Chen
  • , Chi Tsung Chiu
  • , Jin-Chern Chiou
  • , Ching Te Chuang
  • , Wei Hwang
  • , Ho Ming Tong
  • , Kuan-Neng Chen

Research output: Contribution to journalArticlepeer-review

113 Scopus citations

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