Nonvolatile polycrystalline silicon thin-film-transistor memory with oxide/nitride/oxide stack gate dielectrics and nanowire channels

Shih Ching Chen*, Ting Chang Chang, Po-Tsun Liu, Yung Chun Wu, Ping Hung Yeh, Chi Feng Weng, S. M. Sze, Chun Yen Chang, Chen Hsin Lien

*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

32 Scopus citations

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Engineering

Material Science