Nondestructive nanoscale profile measurement on two-dimensional photonic crystal structure using differential confocal microscopy

Wen Chuan Kuo*, Fu Jay Juang, Hong Ren Su, Mei Li Hsieh

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

Abstract

In this study, the authors evaluated the effectiveness of using the nanometer depth sensitivity of differential confocal microscopy (DCM) to measure the surface profile of the two-dimensional (2D) photonic crystal structure. The depth of the micropore on the 2D hexagonal photonic crystal sample can be measured within 4.2 nm resolution. The surface profile of the 2D photonic crystal structure on the photoresist can be obtained by the nondestructive and noncontact DCM method, and the results were comparable to those from the commercial atomic force microscope method.

Original languageEnglish
Pages (from-to)1805-1808
Number of pages4
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume27
Issue number4
DOIs
StatePublished - 2009

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