TY - JOUR
T1 - Ni-carbon nanotubes nanocomposite for robust microelectromechanical systems fabrication
AU - Tsai, Li Nuan
AU - Cheng, Yu-Ting
AU - Hsu, Wen-Syang
AU - Fang, Weileun
PY - 2006/1
Y1 - 2006/1
N2 - This article presents a novel fabrication process to enhance the operational performance and reliability of electrothermal microactuators. Carbon nanotubes (CNTs) (outer diameter: 10-20 nm, inner diameter: 5-10 nm, length: 0.5-200 μm) are incorporated in an electrolytic nickel deposition process in which a well-dispersed Ni-CNTs colloidal solution is made by a special acid oxidative method to synthesis a Ni-CNTs nanocomposite for device fabrication. Measurement results show that the microactuator plated with CNTs (0.028 gL) needs the power requirement less 95% than the pure nickel device at the same output displacement of 3 μm. The performance improvement of the electrothermal microactuator made of the nanocomposite, including device strength and power efficiency, has shown to be similar to the Ni-diamond composites (L. N. Tsai, G. R. Shen, Y. T. Cheng, and W. S. Hsu, The 54th Electronic Components and Technology Conference, June 2004, pp. 472-476)). In addition, the Eρ ratio of the Ni-CNTs composite can be enhanced to 1.47 times higher than that of pure nickel, which is a fascinating result for resonant device fabrication.
AB - This article presents a novel fabrication process to enhance the operational performance and reliability of electrothermal microactuators. Carbon nanotubes (CNTs) (outer diameter: 10-20 nm, inner diameter: 5-10 nm, length: 0.5-200 μm) are incorporated in an electrolytic nickel deposition process in which a well-dispersed Ni-CNTs colloidal solution is made by a special acid oxidative method to synthesis a Ni-CNTs nanocomposite for device fabrication. Measurement results show that the microactuator plated with CNTs (0.028 gL) needs the power requirement less 95% than the pure nickel device at the same output displacement of 3 μm. The performance improvement of the electrothermal microactuator made of the nanocomposite, including device strength and power efficiency, has shown to be similar to the Ni-diamond composites (L. N. Tsai, G. R. Shen, Y. T. Cheng, and W. S. Hsu, The 54th Electronic Components and Technology Conference, June 2004, pp. 472-476)). In addition, the Eρ ratio of the Ni-CNTs composite can be enhanced to 1.47 times higher than that of pure nickel, which is a fascinating result for resonant device fabrication.
UR - http://www.scopus.com/inward/record.url?scp=31544439661&partnerID=8YFLogxK
U2 - 10.1116/1.2161222
DO - 10.1116/1.2161222
M3 - Article
AN - SCOPUS:31544439661
SN - 1071-1023
VL - 24
SP - 205
EP - 210
JO - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
JF - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
IS - 1
ER -