New patterning application for pentacene-based OTFTs by self-assembly monolayer (SAM) material

Hsiao-Wen Zan*, Cheng Wei Chou, Kuo Hsi Yen, Ting Yuan Tu, Yu Min Chiou

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review


A patterning method for pentacene film is proposed. This method was realized self-assembled layer (SAM) and ultra-violet (UV) light post-exposure. The surface characteristic on the gate dielectric is controlled. The difference of the interfacial binding energy between the pentacene film and the dielectric enables the pentacene film to be removed selectively. The remaining pentacene film was fabricated as a top-contact OTFT to confirm the practicability of this technology. The performance kept favorable and superior to that of the control sample. The mobility, the on/off current ratio and the sub-threshold swing were also improved.

Original languageEnglish
Pages (from-to)90-92
Number of pages3
JournalSID Conference Record of the International Display Research Conference
StatePublished - Sep 2006
EventSID 26th International Display Research Conference - Kent, OH, United States
Duration: 18 Sep 200621 Sep 2006


  • OTFTs
  • Patterning
  • SAM


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