New layout scheme to improve ESD robustness of I/O buffers in fully-silicided CMOS process

Ming-Dou Ker*, Wen Yi Chen, Wuu Trong Shieh, I. Ju Wei

*Corresponding author for this work

    Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

    2 Scopus citations

    Abstract

    Silicidation used in CMOS processes has been reported to result in substantial degradation on ESD robustness of CMOS devices. In this work, a new ballasting layout scheme for fully-silicided I/O buffer is proposed to enhance its ESD robustness. Experimental results from real IC products have confirmed that the new ballasting layout scheme can successfully increase HBM ESD robustness of fully-silicided I/O buffers from 1.5kV to 7kV without using the additional silicide-blocking mask.

    Original languageEnglish
    Title of host publicationElectrical Overstress/Electrostatic Discharge Symposium Proceedings 2009, EOS/ESD 2009
    StatePublished - Nov 2009
    EventElectrical Overstress/Electrostatic Discharge Symposium 2009, EOS/ESD 2009 - Anaheim, CA, United States
    Duration: 30 Aug 20094 Sep 2009

    Publication series

    NameElectrical Overstress/Electrostatic Discharge Symposium Proceedings
    ISSN (Print)0739-5159

    Conference

    ConferenceElectrical Overstress/Electrostatic Discharge Symposium 2009, EOS/ESD 2009
    Country/TerritoryUnited States
    CityAnaheim, CA
    Period30/08/094/09/09

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