Near-infrared femtosecond laser crystallized poly-Si thin film transistors

Keyphrases

• Annealing 100%
• Polycrystalline Silicon Thin-film Transistors (poly-Si TFTs) 100%
• Nanosecond Laser Annealing 100%
• Near-infrared Femtosecond Laser 100%
• Polysilicon 33%
• Subthreshold Slope 33%
• Thin-film Transistors 33%
• Density of States 33%
• Process Window 33%
• Transistor 33%
• Threshold Voltage 33%
• Channel Dimensions 33%
• Field-effect Mobility 33%
• Electrical Parameters 33%
• Laser Fluence 33%
• Tail States 33%
• Deep State 33%
• Lower Tail 33%
• Midgap States 33%

Engineering

• Thin-Film Transistor 100%
• Femtosecond Laser 100%
• Polysilicon 100%
• Subthreshold Slope 25%
• Process Window 25%
• Channel Dimension 25%
• Laser Fluence 25%
• Midgap State 25%

Material Science

• Silicon 100%
• Thin-Film Transistor 100%
• Density 33%
• Transistor 33%