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Nano-Scale Depth Profiles of Electrical Properties of Phosphorus Doped Silicon for Ultra-Shallow Junction Evaluation
Hung Yuan Chang, Yew Chung Sermon Wu, Chia He Chang, Kun Lin Lin*, Abhijeet Joshi, Bulent M. Basol
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
3
Scopus
citations