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Multi Heat-Sink CMOS-BEOL Integrated MEMS Pirani Gauge for Vacuum Detection in Packaged Microsensors

  • Manu Garg
  • , Fang Wei Tsai
  • , Sushil Kumar
  • , Yi Chiu*
  • , Pushpapraj Singh
    • *Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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