Monte-Carlo Modeling and Characterization of Switching Dynamics for Antiferroelectric/Ferroelectric HZO considering Mechanisms of Fatigue

Yu Chen Chen*, Kuo Yu Hsiang, Min Hung Lee, Pin Su*

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations

Abstract

We have conducted an NLS-based Monte-Carlo modeling and characterization for switching dynamics of fatigued antiferroelectric/ferroelectric (AFE/FE)HZO. We have modeled the domain pinning probability considering fatigue mechanisms mediated by oxygen vacancy and charge injection for each orthorhombic-phase and tetragonal-phase grains. Our model has been verified with experimental data, and can be beneficial for future AFE/FE memory applications.

Original languageEnglish
Title of host publication2022 International Electron Devices Meeting, IEDM 2022
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1341-1344
Number of pages4
ISBN (Electronic)9781665489591
DOIs
StatePublished - 2022
Event2022 International Electron Devices Meeting, IEDM 2022 - San Francisco, United States
Duration: 3 Dec 20227 Dec 2022

Publication series

NameTechnical Digest - International Electron Devices Meeting, IEDM
Volume2022-December
ISSN (Print)0163-1918

Conference

Conference2022 International Electron Devices Meeting, IEDM 2022
Country/TerritoryUnited States
CitySan Francisco
Period3/12/227/12/22

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