Monolithic Multi-Sensor Design with Resonator-Based MEMS Structures
- F. Y. Kuo*
- , C. Y. Lin
- , P. C. Chuang
- , C. L. Chien
- , Y. L. Yeh
- , Stella K.A. Wen
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
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