Monolithic Multi-Sensor Design with Resonator-Based MEMS Structures

F. Y. Kuo*, C. Y. Lin, P. C. Chuang, C. L. Chien, Y. L. Yeh, Stella K.A. Wen

*Corresponding author for this work

    Research output: Contribution to journalArticlepeer-review

    15 Scopus citations


    In this paper, we demonstrated a resonator-based MEMS architecture for multi-sensor SOC applications. A newly developed 0.18 {\mu }\text{m} 1P6M CMOS ASIC/MEMS process was adopted to integrate MEMS sensor and circuits monolithically. By using resonators as the building blocks, multiple MEMS sensors including environmental temperature sensor, ambient pressure sensor, accelerometer as well as gyro sensor can be monolithically implemented with the readout circuits by the single standard ASIC/MEMS process without off-fab pre/post processes. The proposed architecture enables compact and innovative sentient-assisted SOC design for the emerging IOT applications.

    Original languageEnglish
    Article number7851031
    Pages (from-to)214-218
    Number of pages5
    JournalIEEE Journal of the Electron Devices Society
    Issue number3
    StatePublished - May 2017


    • CMOS MEMS sensor
    • monolithic design
    • Silicon resonator
    • single process for multiple sensors


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