Monolithic Multi-Sensor Design with Resonator-Based MEMS Structures

F. Y. Kuo*, C. Y. Lin, P. C. Chuang, C. L. Chien, Y. L. Yeh, Stella K.A. Wen

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

11 Scopus citations

Abstract

In this paper, we demonstrated a resonator-based MEMS architecture for multi-sensor SOC applications. A newly developed 0.18 {\mu }\text{m} 1P6M CMOS ASIC/MEMS process was adopted to integrate MEMS sensor and circuits monolithically. By using resonators as the building blocks, multiple MEMS sensors including environmental temperature sensor, ambient pressure sensor, accelerometer as well as gyro sensor can be monolithically implemented with the readout circuits by the single standard ASIC/MEMS process without off-fab pre/post processes. The proposed architecture enables compact and innovative sentient-assisted SOC design for the emerging IOT applications.

Original languageEnglish
Article number7851031
Pages (from-to)214-218
Number of pages5
JournalIEEE Journal of the Electron Devices Society
Volume5
Issue number3
DOIs
StatePublished - May 2017

Keywords

  • CMOS MEMS sensor
  • monolithic design
  • Silicon resonator
  • single process for multiple sensors

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