Monolithic Multi-Sensor Design with Resonator-Based MEMS Structures

F. Y. Kuo; C. Y. Lin; P. C. Chuang; C. L. Chien; Y. L. Yeh; Stella K.A. Wen

doi:10.1109/JEDS.2017.2666821

Monolithic Multi-Sensor Design with Resonator-Based MEMS Structures

F. Y. Kuo^*, C. Y. Lin, P. C. Chuang, C. L. Chien, Y. L. Yeh, Stella K.A. Wen

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

21 Scopus citations

Abstract

In this paper, we demonstrated a resonator-based MEMS architecture for multi-sensor SOC applications. A newly developed 0.18 {\mu }\text{m} 1P6M CMOS ASIC/MEMS process was adopted to integrate MEMS sensor and circuits monolithically. By using resonators as the building blocks, multiple MEMS sensors including environmental temperature sensor, ambient pressure sensor, accelerometer as well as gyro sensor can be monolithically implemented with the readout circuits by the single standard ASIC/MEMS process without off-fab pre/post processes. The proposed architecture enables compact and innovative sentient-assisted SOC design for the emerging IOT applications.

Original language	English
Article number	7851031
Pages (from-to)	214-218
Number of pages	5
Journal	IEEE Journal of the Electron Devices Society
Volume	5
Issue number	3
DOIs	https://doi.org/10.1109/JEDS.2017.2666821
State	Published - May 2017

Keywords

CMOS MEMS sensor
Silicon resonator
monolithic design
single process for multiple sensors

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10.1109/JEDS.2017.2666821

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title = "Monolithic Multi-Sensor Design with Resonator-Based MEMS Structures",

abstract = "In this paper, we demonstrated a resonator-based MEMS architecture for multi-sensor SOC applications. A newly developed 0.18 {\mu }\text{m} 1P6M CMOS ASIC/MEMS process was adopted to integrate MEMS sensor and circuits monolithically. By using resonators as the building blocks, multiple MEMS sensors including environmental temperature sensor, ambient pressure sensor, accelerometer as well as gyro sensor can be monolithically implemented with the readout circuits by the single standard ASIC/MEMS process without off-fab pre/post processes. The proposed architecture enables compact and innovative sentient-assisted SOC design for the emerging IOT applications.",

keywords = "CMOS MEMS sensor, Silicon resonator, monolithic design, single process for multiple sensors",

author = "Kuo, {F. Y.} and Lin, {C. Y.} and Chuang, {P. C.} and Chien, {C. L.} and Yeh, {Y. L.} and Wen, {Stella K.A.}",

note = "Publisher Copyright: {\textcopyright} 2013 IEEE.",

year = "2017",

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AU - Yeh, Y. L.

AU - Wen, Stella K.A.

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AB - In this paper, we demonstrated a resonator-based MEMS architecture for multi-sensor SOC applications. A newly developed 0.18 {\mu }\text{m} 1P6M CMOS ASIC/MEMS process was adopted to integrate MEMS sensor and circuits monolithically. By using resonators as the building blocks, multiple MEMS sensors including environmental temperature sensor, ambient pressure sensor, accelerometer as well as gyro sensor can be monolithically implemented with the readout circuits by the single standard ASIC/MEMS process without off-fab pre/post processes. The proposed architecture enables compact and innovative sentient-assisted SOC design for the emerging IOT applications.

KW - CMOS MEMS sensor

KW - Silicon resonator

KW - monolithic design

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Monolithic Multi-Sensor Design with Resonator-Based MEMS Structures

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