Monolithic integration of digital MEMS thermometer and temperature compensated RTC on 1P6M ASIC compatible CMOS MEMS process

Ching Wen Hsu, Kuei-Ann Wen

    Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

    5 Scopus citations

    Fingerprint

    Dive into the research topics of 'Monolithic integration of digital MEMS thermometer and temperature compensated RTC on 1P6M ASIC compatible CMOS MEMS process'. Together they form a unique fingerprint.

    Keyphrases

    Material Science

    Physics