Monolayer MoS2 Enabled Single-Crystalline Growth of AlN on Si(100) Using Low-Temperature Helicon Sputtering

Wei Fan Hsu, Li Syuan Lu, Po Chun Kuo, Jie He Chen, Wei Chen Chueh, Han Yeh, Hui Ling Kao*, Jyh Shin Chen, Wen Hao Chang

*Corresponding author for this work

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Engineering & Materials Science

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