Skip to main navigation Skip to search Skip to main content

Molybdenum gate electrode technology for deep sub-micron CMOS generations

  • Pushkar Ranade*
  • , Ronald Lin
  • , Qiang Lu
  • , Yee Chia Yeo
  • , Hideki Takeuchi
  • , Tsu Jae King
  • , Chen-Ming Hu
    • *Corresponding author for this work

Research output: Contribution to journal › Conference article › peer-review

10 Scopus citations

Fingerprint

Dive into the research topics of 'Molybdenum gate electrode technology for deep sub-micron CMOS generations'. Together they form a unique fingerprint.
Sort by

Keyphrases

Material Science

Engineering

Chemical Engineering