Molybdenum gate electrode technology for deep sub-micron CMOS generations

Pushkar Ranade*, Ronald Lin, Qiang Lu, Yee Chia Yeo, Hideki Takeuchi, Tsu Jae King, Chen-Ming Hu

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

9 Scopus citations

Fingerprint

Dive into the research topics of 'Molybdenum gate electrode technology for deep sub-micron CMOS generations'. Together they form a unique fingerprint.

Keyphrases

Material Science

Engineering

Chemical Engineering