Abstract
We have successfully developed a selective surface coating technique to control the modal behavior of the ion-implanted vertical-cavity surface-emitting laser (VCSEL). With selective deposition of a germanium coating by the lift-off process, we could spatially control the threshold gain condition of the VCSEL to support the single transverse mode. The threshold current is 7 mA and single transverse mode operation is maintained up to 1 mW. The method is simple and nondestructive compared with other techniques.
Original language | English |
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Pages (from-to) | 614-616 |
Number of pages | 3 |
Journal | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers |
Volume | 40 |
Issue number | 2 A |
DOIs | |
State | Published - Feb 2001 |
Keywords
- AR coating
- Proton implant
- Single-mode
- VCSEL