Mobility improvement of HfO2 LTPS TFTs with nitrogen implantation

Ming Wen Ma*, Tsung Yu Yang, Kuo Hsing Kao, Chun Jung Su, Chih Yang Chen, Tien-Sheng Chao, Tan Fu Lei

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

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Material Science