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Mix-and-match lithography processes for 0.1 μm MOS transistor device fabrication
Jen Yu Yew*, Lih Juann Chen, Kazumitsu Nakamura, Tien-Sheng Chao, Horng-Chih Lin
*Corresponding author for this work
Research output: Contribution to journal › Conference article › peer-review
1
Scopus
citations