Microstructures and mechanical properties of Sb-doped ZnO thin films deposited on a-plane sapphire substrates

Hou Guang Chen, Phuoc Huu Le, I. Ju Teng, Yu Min Hu*, Chih Ming Lin*, Wu Ching Chou, Jenh Yih Juang, Sheng Rui Jian*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

Abstract

The structural features and nanomechanical properties of ZnO and Sb-doped (1.0 at%) ZnO (SbZO) thin films deposited on a-plane sapphire substrates by radio-frequency (RF) magnetron sputtering are comparatively investigated in this study. The X-ray diffraction and atomic force microscopy analyses indicated that both ZnO and SbZO thin films were highly (002)-oriented albeit with somewhat different grain structure and surface morphologies. Nanoindentation results of both films exhibited apparent discontinuities (so-called pop-ins) in the load-displacement curves (P-h curves), while no discontinuity was observed in the unloading segment of the P-h curves. By using a Berkovich nanoindenter operating with the continuous contact stiffness measurement mode, the obtained hardness and Young's modulus of ZnO (SbZO) thin films are 7.3 ± 0.2 (8.5 ± 0.4) GPa and 259.6 ± 17.8 (327.4 ± 13.9) GPa, respectively. Furthermore, the facture toughness and fracture energy of ZnO and SbZO thin films obtained by Vickers indentation were also compared.

Original languageEnglish
Pages (from-to)614-621
Number of pages8
JournalCeramics International
Volume50
Issue number1
DOIs
StatePublished - 1 Jan 2024

Keywords

  • Hardness
  • Nanoindentation
  • Pop-in
  • Sb-doped ZnO thin films
  • XPS
  • XRD

Fingerprint

Dive into the research topics of 'Microstructures and mechanical properties of Sb-doped ZnO thin films deposited on a-plane sapphire substrates'. Together they form a unique fingerprint.

Cite this