Microstructures and mechanical properties of Sb-doped ZnO thin films deposited on a-plane sapphire substrates

Hou Guang Chen; Phuoc Huu Le; I. Ju Teng; Yu Min Hu; Chih Ming Lin; Wu Ching Chou; Jenh Yih Juang; Sheng Rui Jian

doi:10.1016/j.ceramint.2023.10.139

Microstructures and mechanical properties of Sb-doped ZnO thin films deposited on a-plane sapphire substrates

Hou Guang Chen, Phuoc Huu Le, I. Ju Teng, Yu Min Hu^*, Chih Ming Lin^*, Wu Ching Chou, Jenh Yih Juang, Sheng Rui Jian^*

^*Corresponding author for this work

Department of Electrophysics

Research output: Contribution to journal › Article › peer-review

1 Scopus citations

Abstract

The structural features and nanomechanical properties of ZnO and Sb-doped (1.0 at%) ZnO (SbZO) thin films deposited on a-plane sapphire substrates by radio-frequency (RF) magnetron sputtering are comparatively investigated in this study. The X-ray diffraction and atomic force microscopy analyses indicated that both ZnO and SbZO thin films were highly (002)-oriented albeit with somewhat different grain structure and surface morphologies. Nanoindentation results of both films exhibited apparent discontinuities (so-called pop-ins) in the load-displacement curves (P-h curves), while no discontinuity was observed in the unloading segment of the P-h curves. By using a Berkovich nanoindenter operating with the continuous contact stiffness measurement mode, the obtained hardness and Young's modulus of ZnO (SbZO) thin films are 7.3 ± 0.2 (8.5 ± 0.4) GPa and 259.6 ± 17.8 (327.4 ± 13.9) GPa, respectively. Furthermore, the facture toughness and fracture energy of ZnO and SbZO thin films obtained by Vickers indentation were also compared.

Original language	English
Pages (from-to)	614-621
Number of pages	8
Journal	Ceramics International
Volume	50
Issue number	1
DOIs	https://doi.org/10.1016/j.ceramint.2023.10.139
State	Published - 1 Jan 2024

Keywords

Hardness
Nanoindentation
Pop-in
Sb-doped ZnO thin films
XPS
XRD

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10.1016/j.ceramint.2023.10.139

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@article{3937b264bf824d0696d00ac9b7c1af4a,

title = "Microstructures and mechanical properties of Sb-doped ZnO thin films deposited on a-plane sapphire substrates",

abstract = "The structural features and nanomechanical properties of ZnO and Sb-doped (1.0 at%) ZnO (SbZO) thin films deposited on a-plane sapphire substrates by radio-frequency (RF) magnetron sputtering are comparatively investigated in this study. The X-ray diffraction and atomic force microscopy analyses indicated that both ZnO and SbZO thin films were highly (002)-oriented albeit with somewhat different grain structure and surface morphologies. Nanoindentation results of both films exhibited apparent discontinuities (so-called pop-ins) in the load-displacement curves (P-h curves), while no discontinuity was observed in the unloading segment of the P-h curves. By using a Berkovich nanoindenter operating with the continuous contact stiffness measurement mode, the obtained hardness and Young's modulus of ZnO (SbZO) thin films are 7.3 ± 0.2 (8.5 ± 0.4) GPa and 259.6 ± 17.8 (327.4 ± 13.9) GPa, respectively. Furthermore, the facture toughness and fracture energy of ZnO and SbZO thin films obtained by Vickers indentation were also compared.",

keywords = "Hardness, Nanoindentation, Pop-in, Sb-doped ZnO thin films, XPS, XRD",

author = "Chen, {Hou Guang} and Le, {Phuoc Huu} and Teng, {I. Ju} and Hu, {Yu Min} and Lin, {Chih Ming} and Chou, {Wu Ching} and Juang, {Jenh Yih} and Jian, {Sheng Rui}",

note = "Publisher Copyright: {\textcopyright} 2023 Elsevier Ltd and Techna Group S.r.l.",

year = "2024",

month = jan,

day = "1",

doi = "10.1016/j.ceramint.2023.10.139",

language = "English",

volume = "50",

pages = "614--621",

journal = "Ceramics International",

issn = "0272-8842",

publisher = "Elsevier Ltd",

number = "1",

}

TY - JOUR

T1 - Microstructures and mechanical properties of Sb-doped ZnO thin films deposited on a-plane sapphire substrates

AU - Chen, Hou Guang

AU - Le, Phuoc Huu

AU - Teng, I. Ju

AU - Hu, Yu Min

AU - Lin, Chih Ming

AU - Chou, Wu Ching

AU - Juang, Jenh Yih

AU - Jian, Sheng Rui

PY - 2024/1/1

Y1 - 2024/1/1

N2 - The structural features and nanomechanical properties of ZnO and Sb-doped (1.0 at%) ZnO (SbZO) thin films deposited on a-plane sapphire substrates by radio-frequency (RF) magnetron sputtering are comparatively investigated in this study. The X-ray diffraction and atomic force microscopy analyses indicated that both ZnO and SbZO thin films were highly (002)-oriented albeit with somewhat different grain structure and surface morphologies. Nanoindentation results of both films exhibited apparent discontinuities (so-called pop-ins) in the load-displacement curves (P-h curves), while no discontinuity was observed in the unloading segment of the P-h curves. By using a Berkovich nanoindenter operating with the continuous contact stiffness measurement mode, the obtained hardness and Young's modulus of ZnO (SbZO) thin films are 7.3 ± 0.2 (8.5 ± 0.4) GPa and 259.6 ± 17.8 (327.4 ± 13.9) GPa, respectively. Furthermore, the facture toughness and fracture energy of ZnO and SbZO thin films obtained by Vickers indentation were also compared.

AB - The structural features and nanomechanical properties of ZnO and Sb-doped (1.0 at%) ZnO (SbZO) thin films deposited on a-plane sapphire substrates by radio-frequency (RF) magnetron sputtering are comparatively investigated in this study. The X-ray diffraction and atomic force microscopy analyses indicated that both ZnO and SbZO thin films were highly (002)-oriented albeit with somewhat different grain structure and surface morphologies. Nanoindentation results of both films exhibited apparent discontinuities (so-called pop-ins) in the load-displacement curves (P-h curves), while no discontinuity was observed in the unloading segment of the P-h curves. By using a Berkovich nanoindenter operating with the continuous contact stiffness measurement mode, the obtained hardness and Young's modulus of ZnO (SbZO) thin films are 7.3 ± 0.2 (8.5 ± 0.4) GPa and 259.6 ± 17.8 (327.4 ± 13.9) GPa, respectively. Furthermore, the facture toughness and fracture energy of ZnO and SbZO thin films obtained by Vickers indentation were also compared.

KW - Hardness

KW - Nanoindentation

KW - Pop-in

KW - Sb-doped ZnO thin films

KW - XPS

KW - XRD

UR - http://www.scopus.com/inward/record.url?scp=85174699650&partnerID=8YFLogxK

U2 - 10.1016/j.ceramint.2023.10.139

DO - 10.1016/j.ceramint.2023.10.139

M3 - Article

AN - SCOPUS:85174699650

SN - 0272-8842

VL - 50

SP - 614

EP - 621

JO - Ceramics International

JF - Ceramics International

IS - 1

ER -

Microstructures and mechanical properties of Sb-doped ZnO thin films deposited on a-plane sapphire substrates

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