Abstract
The knife-edge method is a commonly used technique to characterize the optical profiles of laser beams or focused spots. In this paper, we present a micro knife-edge scanner fabricated in a silicon-on-insulator substrate using the micro-electromechanical-system technology. A photo detector can be fabricated in the device to allow further integration with on-chip signal conditioning circuitry. A novel backside deep reactive ion etching process is proposed to solve the residual stress effect due to the buried oxide layer. Focused optical spot profile measurement is demonstrated.
Original language | English |
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Pages (from-to) | 6367-6373 |
Number of pages | 7 |
Journal | Optics Express |
Volume | 15 |
Issue number | 10 |
DOIs | |
State | Published - 14 May 2007 |