Micro actuated grating for multi-beam optical pickups

Chi Hung Lee*, Yi Chiu, Han Ping D Shieh

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

4 Scopus citations


A stress-induced curved polysilicon actuator with a grating is achieved for the application of recordable optical pickups, which have been realized on a single silicon chip using a two-layer poly-silicon and one-layer silicon nitride micro-machining process. Three diffracted beams with equal intensity in each order from the grating were generated while applying a voltage to the actuator. The switching between the single beam and multiple beams can be applied for writing data and reading data in the disc, respectively.

Original languageEnglish
Pages (from-to)1408-1414
Number of pages7
JournalOptics Express
Issue number4
StatePublished - 19 Feb 2007


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