| Original language | English |
|---|---|
| Patent number | US 7,998,539 B2 |
| State | Published - 16 Aug 2011 |
METHOD OF FORMING THIN-FILM STRUCTURE BY OBLIQUE-ANGLE DEPPOSITIOIN
Hao-Chung Kuo (Inventor), Pei-Chen Yu (Inventor)
Research output: Patent
Hao-Chung Kuo (Inventor), Pei-Chen Yu (Inventor)
Research output: Patent
| Original language | English |
|---|---|
| Patent number | US 7,998,539 B2 |
| State | Published - 16 Aug 2011 |