| Original language | English |
|---|---|
| Patent number | US 8,541,314 B2 |
| State | Published - 24 Sep 2013 |
method for smoothing group III nitride semiconductor substrate
Wei-I Lee (Inventor)
Research output: Patent
Wei-I Lee (Inventor)
Research output: Patent
| Original language | English |
|---|---|
| Patent number | US 8,541,314 B2 |
| State | Published - 24 Sep 2013 |