| Original language | English |
|---|---|
| Patent number | US 9,396,936 B2 |
| State | Published - 19 Jul 2016 |
METHOD FOR GROWING ALUMINUM INDIUM NITRIDE FILMS ON SILICON SUBSTRATE
Li Chang (Inventor)
Research output: Patent
Li Chang (Inventor)
Research output: Patent
| Original language | English |
|---|---|
| Patent number | US 9,396,936 B2 |
| State | Published - 19 Jul 2016 |