Metasurfaces on silicon photonic waveguides for simultaneous emission phase and amplitude control

Ping Yen Hsieh, Shun Lin Fang, Y. S. Lin, Wen Hsien Huang, Jia Min Shieh, Peichen Yu, You-Chia Chang*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

7 Scopus citations

Abstract

Chip-scale photonic systems that manipulate free-space emission have recently attracted attention for applications such as free-space optical communications and solid-state LiDAR. Silicon photonics, as a leading platform for chip-scale integration, needs to offer more versatile control of free-space emission. Here we integrate metasurfaces on silicon photonic waveguides to generate free-space emission with controlled phase and amplitude profiles. We demonstrate experimentally structured beams, including a focused Gaussian beam and a HermiteGaussian TEM10 beam, as well as
olographic image projections. Our approach is monolithic and CMOS-compatible. The simultaneous phase and amplitude control enable more faithful generation of structured beams and speckle-reduced projection of holographic images.
Original languageEnglish
Pages (from-to)12487-12496
JournalOptics Express
Volume31
Issue number8
DOIs
StatePublished - 30 Mar 2023

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