MEMS resonator based thermometer SoC design in CMOS 0.18 μm standard process

Chong Yang Lin, Kuei-Ann Wen

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Scopus citations

Abstract

This paper presents a thermometer SoC design that can be manufactured and monolithically integrated in the ASIC standard CMOS process. A high gain low power trans-impedance amplifler(TIA) circuit and phase locked loop(PLL) are designed for readout. The resonator based thermometer has been demonstrated with a sensitivity -5.7Hz/°C(-139ppm) in a temperature range from -40°C to 120°C. Power consumption of the readout circuit is only 190.4μW.

Original languageEnglish
Title of host publicationISOCC 2016 - International SoC Design Conference
Subtitle of host publicationSmart SoC for Intelligent Things
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages13-14
Number of pages2
ISBN (Electronic)9781467393089
DOIs
StatePublished - 27 Dec 2016
Event13th International SoC Design Conference, ISOCC 2016 - Jeju, Korea, Republic of
Duration: 23 Oct 201626 Oct 2016

Publication series

NameISOCC 2016 - International SoC Design Conference: Smart SoC for Intelligent Things

Conference

Conference13th International SoC Design Conference, ISOCC 2016
Country/TerritoryKorea, Republic of
CityJeju
Period23/10/1626/10/16

Keywords

  • ASIC/MEMS process
  • PLL
  • Resonator
  • Thermometer
  • TLA

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