MEMS resonator based thermometer SoC design in CMOS 0.18 μm standard process

Chong Yang Lin; Kuei-Ann Wen

doi:10.1109/ISOCC.2016.7799717

MEMS resonator based thermometer SoC design in CMOS 0.18 μm standard process

Chong Yang Lin, Kuei-Ann Wen

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

2 Scopus citations

Abstract

This paper presents a thermometer SoC design that can be manufactured and monolithically integrated in the ASIC standard CMOS process. A high gain low power trans-impedance amplifler(TIA) circuit and phase locked loop(PLL) are designed for readout. The resonator based thermometer has been demonstrated with a sensitivity -5.7Hz/°C(-139ppm) in a temperature range from -40°C to 120°C. Power consumption of the readout circuit is only 190.4μW.

Original language	English
Title of host publication	ISOCC 2016 - International SoC Design Conference
Subtitle of host publication	Smart SoC for Intelligent Things
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	13-14
Number of pages	2
ISBN (Electronic)	9781467393089
DOIs	https://doi.org/10.1109/ISOCC.2016.7799717
State	Published - 27 Dec 2016
Event	13th International SoC Design Conference, ISOCC 2016 - Jeju, Korea, Republic of Duration: 23 Oct 2016 → 26 Oct 2016

Publication series

Name	ISOCC 2016 - International SoC Design Conference: Smart SoC for Intelligent Things

Conference

Conference	13th International SoC Design Conference, ISOCC 2016
Country/Territory	Korea, Republic of
City	Jeju
Period	23/10/16 → 26/10/16

Keywords

ASIC/MEMS process
PLL
Resonator
Thermometer
TLA

Access to Document

10.1109/ISOCC.2016.7799717

Cite this

Lin, C. Y., & Wen, K.-A. (2016). MEMS resonator based thermometer SoC design in CMOS 0.18 μm standard process. In ISOCC 2016 - International SoC Design Conference: Smart SoC for Intelligent Things (pp. 13-14). Article 7799717 (ISOCC 2016 - International SoC Design Conference: Smart SoC for Intelligent Things). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ISOCC.2016.7799717

@inproceedings{9304aa0909664125ac8efa820bb7846f,

title = "MEMS resonator based thermometer SoC design in CMOS 0.18 μm standard process",

abstract = "This paper presents a thermometer SoC design that can be manufactured and monolithically integrated in the ASIC standard CMOS process. A high gain low power trans-impedance amplifler(TIA) circuit and phase locked loop(PLL) are designed for readout. The resonator based thermometer has been demonstrated with a sensitivity -5.7Hz/°C(-139ppm) in a temperature range from -40°C to 120°C. Power consumption of the readout circuit is only 190.4μW.",

keywords = "ASIC/MEMS process, PLL, Resonator, Thermometer, TLA",

author = "Lin, {Chong Yang} and Kuei-Ann Wen",

year = "2016",

month = dec,

day = "27",

doi = "10.1109/ISOCC.2016.7799717",

language = "English",

series = "ISOCC 2016 - International SoC Design Conference: Smart SoC for Intelligent Things",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "13--14",

booktitle = "ISOCC 2016 - International SoC Design Conference",

address = "United States",

note = "13th International SoC Design Conference, ISOCC 2016 ; Conference date: 23-10-2016 Through 26-10-2016",

}

Lin, CY & Wen, K-A 2016, MEMS resonator based thermometer SoC design in CMOS 0.18 μm standard process. in ISOCC 2016 - International SoC Design Conference: Smart SoC for Intelligent Things., 7799717, ISOCC 2016 - International SoC Design Conference: Smart SoC for Intelligent Things, Institute of Electrical and Electronics Engineers Inc., pp. 13-14, 13th International SoC Design Conference, ISOCC 2016, Jeju, Korea, Republic of, 23/10/16. https://doi.org/10.1109/ISOCC.2016.7799717

MEMS resonator based thermometer SoC design in CMOS 0.18 μm standard process. / Lin, Chong Yang; Wen, Kuei-Ann.
ISOCC 2016 - International SoC Design Conference: Smart SoC for Intelligent Things. Institute of Electrical and Electronics Engineers Inc., 2016. p. 13-14 7799717 (ISOCC 2016 - International SoC Design Conference: Smart SoC for Intelligent Things).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - MEMS resonator based thermometer SoC design in CMOS 0.18 μm standard process

AU - Lin, Chong Yang

AU - Wen, Kuei-Ann

PY - 2016/12/27

Y1 - 2016/12/27

N2 - This paper presents a thermometer SoC design that can be manufactured and monolithically integrated in the ASIC standard CMOS process. A high gain low power trans-impedance amplifler(TIA) circuit and phase locked loop(PLL) are designed for readout. The resonator based thermometer has been demonstrated with a sensitivity -5.7Hz/°C(-139ppm) in a temperature range from -40°C to 120°C. Power consumption of the readout circuit is only 190.4μW.

AB - This paper presents a thermometer SoC design that can be manufactured and monolithically integrated in the ASIC standard CMOS process. A high gain low power trans-impedance amplifler(TIA) circuit and phase locked loop(PLL) are designed for readout. The resonator based thermometer has been demonstrated with a sensitivity -5.7Hz/°C(-139ppm) in a temperature range from -40°C to 120°C. Power consumption of the readout circuit is only 190.4μW.

KW - ASIC/MEMS process

KW - PLL

KW - Resonator

KW - Thermometer

KW - TLA

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U2 - 10.1109/ISOCC.2016.7799717

DO - 10.1109/ISOCC.2016.7799717

M3 - Conference contribution

AN - SCOPUS:85010403587

T3 - ISOCC 2016 - International SoC Design Conference: Smart SoC for Intelligent Things

SP - 13

EP - 14

BT - ISOCC 2016 - International SoC Design Conference

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 13th International SoC Design Conference, ISOCC 2016

Y2 - 23 October 2016 through 26 October 2016

ER -

Lin CY, Wen KA. MEMS resonator based thermometer SoC design in CMOS 0.18 μm standard process. In ISOCC 2016 - International SoC Design Conference: Smart SoC for Intelligent Things. Institute of Electrical and Electronics Engineers Inc. 2016. p. 13-14. 7799717. (ISOCC 2016 - International SoC Design Conference: Smart SoC for Intelligent Things). doi: 10.1109/ISOCC.2016.7799717

MEMS resonator based thermometer SoC design in CMOS 0.18 μm standard process

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Keywords

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