MEMS-based miniature optical pickup

Yi Chiu*, Cheng-Huan Chen, Jin-Chern Chiou, Weileun Fang, Han Ping D. Shieh

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

8 Scopus citations


The technology challenges for miniature optical pickups include high-numerical-aperture objective lens design, servo actuator functions and performance, and component assembly tolerance. In this paper, a microelectromechanical systems (MEMS)-based miniature optical pickup is proposed for DVD and blue disk systems. A high-order diffractive objective lens with a continuous surface relief is designed. Focus, tilt, and tracking servos are implanted with MEMS micro actuators. Preliminary design and test results are presented.

Original languageEnglish
Pages (from-to)967-970
Number of pages4
JournalIEEE Transactions on Magnetics
Issue number2
StatePublished - Feb 2005


  • Diffractive optical element
  • Microelectromechanical system (MEMS)
  • Micromirror
  • Optical pickup


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