MEMS based micromirror device for optical add/drop module

Jin-Chern Chiou; Y. C. Lin; S. D. Wu; Shiuan-Huei Lin

doi:10.1117/12.448839

MEMS based micromirror device for optical add/drop module

Jin-Chern Chiou^*, Y. C. Lin, S. D. Wu, Shiuan-Huei Lin

^*Corresponding author for this work

Research output: Contribution to journal › Conference article › peer-review

2 Scopus citations

Abstract

In this paper, the configuration of combining holographic gratings and micromirror devices for optical add/drop functions is proposed for constructing OADM. Based on this architecture, a MEMS based vibrating micromirror device that is driven by electrostatic force in executing add/drop functions is designed and fabricated. Preliminary experiments had demonstrated the feasibility of the proposed system.

Original language	American English
Pages (from-to)	82-88
Number of pages	7
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	4593
DOIs	https://doi.org/10.1117/12.448839
State	Published - 1 Dec 2001
Event	Design, Chararacterization, and Packaging for MEMS and Microelectronics II - Adelaide, Australia Duration: 17 Dec 2001 → 19 Dec 2001

Keywords

Holographic gratings
OADM
Optical MEMS

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10.1117/12.448839

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title = "MEMS based micromirror device for optical add/drop module",

abstract = "In this paper, the configuration of combining holographic gratings and micromirror devices for optical add/drop functions is proposed for constructing OADM. Based on this architecture, a MEMS based vibrating micromirror device that is driven by electrostatic force in executing add/drop functions is designed and fabricated. Preliminary experiments had demonstrated the feasibility of the proposed system.",

keywords = "Holographic gratings, OADM, Optical MEMS",

author = "Jin-Chern Chiou and Lin, {Y. C.} and Wu, {S. D.} and Shiuan-Huei Lin",

year = "2001",

month = dec,

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doi = "10.1117/12.448839",

language = "American English",

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pages = "82--88",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

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note = "Design, Chararacterization, and Packaging for MEMS and Microelectronics II ; Conference date: 17-12-2001 Through 19-12-2001",

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TY - JOUR

T1 - MEMS based micromirror device for optical add/drop module

AU - Chiou, Jin-Chern

AU - Lin, Y. C.

AU - Wu, S. D.

AU - Lin, Shiuan-Huei

PY - 2001/12/1

Y1 - 2001/12/1

N2 - In this paper, the configuration of combining holographic gratings and micromirror devices for optical add/drop functions is proposed for constructing OADM. Based on this architecture, a MEMS based vibrating micromirror device that is driven by electrostatic force in executing add/drop functions is designed and fabricated. Preliminary experiments had demonstrated the feasibility of the proposed system.

AB - In this paper, the configuration of combining holographic gratings and micromirror devices for optical add/drop functions is proposed for constructing OADM. Based on this architecture, a MEMS based vibrating micromirror device that is driven by electrostatic force in executing add/drop functions is designed and fabricated. Preliminary experiments had demonstrated the feasibility of the proposed system.

KW - Holographic gratings

KW - OADM

KW - Optical MEMS

UR - http://www.scopus.com/inward/record.url?scp=0035770507&partnerID=8YFLogxK

U2 - 10.1117/12.448839

DO - 10.1117/12.448839

M3 - Conference article

AN - SCOPUS:0035770507

SN - 0277-786X

VL - 4593

SP - 82

EP - 88

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

T2 - Design, Chararacterization, and Packaging for MEMS and Microelectronics II

Y2 - 17 December 2001 through 19 December 2001

ER -

MEMS based micromirror device for optical add/drop module

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Keywords

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