MBE grown 1.3 micron InGaAsN/GaAs double QW VCSELS with very low threshold current density under room temperature CW operation

Chih Ming Lai*, Jyh Shyang Wang, Ru Shang Hsiao, Li Chung Wei, Kuo-Jui Lin, Kun Feng Lin, Hui Yu Liu, Alexey R. Kovsh, Nikolai N. Maleev, Daniil A. Livshits, Jenn-Fang Chen, Jim Young Chi

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review


MBE growth of high quality diluted Nitride materials have been investigated. Photoluminescence intensity of high nitrogen content InGaAsN/GaAs SQW can be improved significantly by decreasing the growth temperature due to suppressd phase separation of InGaAsN alloy. The longest room temperature PL peak wavelength obtained in this study is 1.59 μm by increasing the nitrogen composition up to 5.3 %. High performance ridge-waveguide InGaAsN/GaAs single quantum well lasers at wavelength 1.3 μm have been demonstrated. Threshold current density of 0.57 KA/cm2 was achieved for the lasers with a 3-μm ridge width and a 2-mm cavity length. Slope efficiencies of 0.67 W/A was obtained with 1 mm cavity length. The cw kink-free output power of wavelength 1.3 μm single lateral mode laser is more than 200 mW, and the maximum total wallplug efficiency of 29% was obtained. Furthermore, monolithic MBE-grown vertical cavity surface emitting lasers (VCSELs) on GaAs substrate with an active region based on InGaAsN/GaAs double quantum wells emitting at 1304 nm with record threshold current density below 2 KA/cm2 also have been demonstrated. The CW output power exceeds 1 mW with an initial slope efficiency of 0.15 W/A. Such low threshold current density indicates the high quality of InGaAsN/GaAs QW active region.

Original languageEnglish
Article number39
Pages (from-to)312-322
Number of pages11
JournalProceedings of SPIE - The International Society for Optical Engineering
StatePublished - 1 Sep 2004
EventAstronomical Structures and Mechanisms Technology - Glasgow, United Kingdom
Duration: 21 Jun 200422 Jun 2004


  • Diluted Nitride
  • InGaAsN
  • Intra-cavity


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