| Original language | English |
|---|---|
| Patent number | US 8,445,348 B1 |
| State | Published - 21 May 2013 |
MANUFACTURING METHOD OF A SEMICONDUCTOR COMPONENT WITH A NANOWIRE CHANNEL
Tien-Sheng Chao (Inventor)
Research output: Patent
Tien-Sheng Chao (Inventor)
Research output: Patent
| Original language | English |
|---|---|
| Patent number | US 8,445,348 B1 |
| State | Published - 21 May 2013 |