Making optical MEMS sensors more compact using organic light sources and detectors

Keyphrases

• Light Detector 100%
• Light Source 100%
• Optical MEMS 100%
• MEMS Devices 100%
• MEMS Sensor 100%
• Glass Substrate 50%
• Micromechanics 50%
• Consumer Electronics 50%
• Sensor-based 50%
• Sensor Integration 50%
• Displacement Sensor 50%
• Light Flux 50%
• Sensor Structure 50%
• Organic Photodetectors 50%
• Interference Immunity 50%
• Proof Mass 50%
• Organic Optoelectronics 50%
• Vibration Sensor 50%
• Piezoresistive 50%
• Noise Immunity 50%
• Flux Modulation 50%
• Organic Devices 50%
• Cover Glass 50%
• Readout Method 50%
• Optical Readout 50%

Engineering

• Microelectromechanical System 100%
• Light Detector 100%
• Light Source 100%
• Test Result 33%
• Photodetector 33%
• Consumer Electronics 33%
• Capacitive 33%
• Displacement Sensor 33%
• Optoelectronic Device 33%
• Proof Mass 33%
• Glass Cover 33%
• Glass Substrate 33%

Material Science

• Microelectromechanical System 100%
• Optical Device 33%