Low-temperature microwave annealing processes for future IC fabrication-A review

Yao Jen Lee, Ta Chun Cho, Shang Shiun Chuang, Fu Kuo Hsueh, Yu Lun Lu, Po Jung Sung, Hsiu Chih Chen, Michael I. Current, Tseung-Yuen Tseng, Tien-Sheng Chao, Chen-Ming Hu, Fu Liang Yang

Research output: Contribution to journalReview articlepeer-review

63 Scopus citations

Fingerprint

Dive into the research topics of 'Low-temperature microwave annealing processes for future IC fabrication-A review'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemical Compounds