Low temperature deposition of high quality single crystalline AlN thin films on sapphire using highly oriented monolayer MoS2 as a buffer layer

Hung Yi Chien, Po Chun Kuo, Hui Ling Kao*, Jyh Shin Chen, Meei Ru Chen, Li Syuan Lu, Wei Chen Chueh, Wen Hao Chang*

*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

12 Scopus citations

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Material Science